Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154760 | Inductively-coupled plasma processing apparatus | Hitoshi Saito, Kazuo Sasaki, Toshihiro TOJO | 2024-11-26 |
| 6387208 | Inductive coupling plasma processing apparatus | Kenji Amano | 2002-05-14 |
| 6331754 | Inductively-coupled-plasma-processing apparatus | Kenji Amano, Hiromichi Ito, Yoshito Miyazaki | 2001-12-18 |
| 5636960 | Apparatus for detecting and aligning a substrate | Tutomu Hiroki, Shoichi Abe, Kiyotaka Akiyama | 1997-06-10 |