Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636960 | Apparatus for detecting and aligning a substrate | Tutomu Hiroki, Shoichi Abe, Tsutomu Satoyoshi | 1997-06-10 |
| 5558482 | Multi-chamber system | Tutomu Hiroki, Shoichi Abe | 1996-09-24 |