Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400870 | Substrate processing method and substrate processing apparatus | Hiroki Murakami | 2025-08-26 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Maju TOMURA, Kenji Ouchi, Hiroki Murakami +1 more | 2024-05-28 |