Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8853087 | Method of manufacturing semiconductor device and system for manufacturing semiconductor device | Keisuke Tanaka | 2014-10-07 |
| 8778205 | Processing method and processing system | Tsuyoshi Ohno, Toshihiko Kikuchi, Yoshitaka Saita | 2014-07-15 |
| 7733502 | Roughness evaluation method and system | Tsuyoshi Moriya | 2010-06-08 |