Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8778205 | Processing method and processing system | Tsuyoshi Ohno, Toshihiko Kikuchi, Machi Moriya | 2014-07-15 |
| 6972264 | Method and apparatus for etching Si | Masashi Yamaguchi | 2005-12-06 |