Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237167 | Deposition method | Ken OKOSHI, Yamato Tonegawa | 2025-02-25 |
| 11923177 | Plasma processing apparatus and plasma processing method | Yamato Tonegawa, Kazumasa Igarashi, Kazuo Yabe | 2024-03-05 |