Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8975188 | Plasma etching method | Yusuke Hirayama | 2015-03-10 |
| 8975191 | Plasma etching method | Yusuke Hirayama, Yasuyoshi Ishiyama, Wataru Hashizume | 2015-03-10 |
| 8178439 | Surface cleaning and selective deposition of metal-containing cap layers for semiconductor devices | Frank M. Cerio, Jr. | 2012-05-15 |