Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D405427 | Heat retaining tube for use in a semiconductor wafer heat processing apparatus | — | 1999-02-09 |
| D405428 | Heat retaining tube for use in a semiconductor wafer heat processing apparatus | — | 1999-02-09 |
| D404372 | Ring for use in a semiconductor wafer heat processing apparatus | — | 1999-01-19 |
| D404016 | Heat retaining tube for use in a semiconductor wafer heat processing apparatus | — | 1999-01-12 |
| 5820683 | Object-supporting boat | Isao Hagino, Mitsuo Mizukami | 1998-10-13 |
| D380454 | Wafer boat | Hiroyuki Iwai, Hitoshi Kato | 1997-07-01 |
| 5221201 | Vertical heat treatment apparatus | Kenichi Yamaga, Naotaka Ogino | 1993-06-22 |
| 4586295 | Workpiece centerless support device for use in internal grinding machine | — | 1986-05-06 |