Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5451258 | Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber | W. Chuck Ramsey | 1995-09-19 |
| 5378501 | Method for chemical vapor deposition of titanium nitride films at low temperatures | Robert F. Foster | 1995-01-03 |
| 4966869 | Tungsten disilicide CVD | J. B. Price, William M. Triggs | 1990-10-30 |
| 4496180 | Vacuum handling apparatus | Michael B. Miller | 1985-01-29 |