Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5451258 | Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber | Joseph T. Hillman | 1995-09-19 |
| 5348587 | Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction | Eric C. Eichman, Bruce A. Sommer, Michael J. Churley | 1994-09-20 |
| 5271963 | Elimination of low temperature ammonia salt in TiCl.sub.4 NH.sub.3 CVD reaction | Eric C. Eichman, Bruce A. Sommer, Michael J. Churley | 1993-12-21 |