| 5714416 |
Semiconductor memory device and write-once, read-only semiconductor memory array using amorphous-silicon and method therefor |
Thomas C. Salt |
1998-02-03 |
| 5457649 |
Semiconductor memory device and write-once, read-only semiconductor memory array using amorphous-silicon and method therefor |
Thomas C. Salt |
1995-10-10 |
| 5348587 |
Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction |
Bruce A. Sommer, Michael J. Churley, W. Chuck Ramsey |
1994-09-20 |
| 5308655 |
Processing for forming low resistivity titanium nitride films |
Bruce A. Sommer, Michael J. Churley |
1994-05-03 |
| 5279857 |
Process for forming low resistivity titanium nitride films |
Bruce A. Sommer, Michael J. Churley |
1994-01-18 |
| 5271963 |
Elimination of low temperature ammonia salt in TiCl.sub.4 NH.sub.3 CVD reaction |
Bruce A. Sommer, Michael J. Churley, W. Chuck Ramsey |
1993-12-21 |