Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438797 | Method of quasi atomic layer etching | Andrew Metz | 2019-10-08 |
| 9810980 | Graphoepitaxy directed self assembly | Cheng Chi, Chi-Chun Liu, Kristin Schmidt | 2017-11-07 |
| 9632408 | Graphoepitaxy directed self assembly | Cheng Chi, Chi-Chun Liu, Kristin Schmidt | 2017-04-25 |
| 8501630 | Selective etch process for silicon nitride | Andrew Metz | 2013-08-06 |