Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947850 | Real time analysis of periodic structures on semiconductors | Jon Opsal | 2005-09-20 |
| 6931361 | Real time analysis of periodic structures on semiconductors | Jon Opsal | 2005-08-16 |
| 6919964 | CD metrology analysis using a finite difference method | — | 2005-07-19 |
| 6867866 | CD metrology analysis using green's function | Yia-Chung Chang, Jon Opsal | 2005-03-15 |
| 6856385 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Jon Opsal | 2005-02-15 |
| 6778911 | Real time analysis of periodic structures on semiconductors | Jon Opsal | 2004-08-17 |
| 6704661 | Real time analysis of periodic structures on semiconductors | Jon Opsal | 2004-03-09 |
| 6577384 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Jon Opsal | 2003-06-10 |
| 6281027 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Jon Opsal | 2001-08-28 |