Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8940475 | Double patterning with inline critical dimension slimming | Shannon W. Dunn | 2015-01-27 |
| 8764999 | Sidewall image transfer pitch doubling and inline critical dimension slimming | Shannon W. Dunn | 2014-07-01 |
| 8647817 | Vapor treatment process for pattern smoothing and inline critical dimension slimming | Shannon W. Dunn | 2014-02-11 |
| 8389206 | High normality solution for removing freeze material in lithographic applications | Shannon W. Dunn, Shinichiro KAWAKAMI | 2013-03-05 |