Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6063190 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 2000-05-16 |
| 5942035 | Solvent and resist spin coating apparatus | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 1999-08-24 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 1997-08-19 |