Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7039553 | Phase determination of a radiation wave field | Keith Nugent, David Paganin | 2006-05-02 |
| 7022435 | Method for the manufacture of phase shifting masks for EUV lithography | Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi | 2006-04-04 |
| 6885442 | Phase determination of a radiation wave field | Keith Nugent, David Paganin | 2005-04-26 |