Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11129837 | Salicylate compound composition | Craig Hurst | 2021-09-28 |
| 6142641 | Four-mirror extreme ultraviolet (EUV) lithography projection system | Hwan J. Jeong, David Shafer | 2000-11-07 |
| 5737137 | Critical illumination condenser for x-ray lithography | Lynn G. Seppala | 1998-04-07 |