Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7638106 | Method of treating a gas stream | Christopher Mark Bailey, Michael Andrew Galtry, David Engerran, Andrew James Seeley, Geoffrey Young +2 more | 2009-12-29 |
| 7514119 | Method and apparatus for using solution based precursors for atomic layer deposition | Ce Ma, Qing Min Wang, Patrick J. Helly | 2009-04-07 |
| 6955707 | Method of recycling fluorine using an adsorption purification process | Edward Frederick Ezell, Walter H. Whitlock, Graham McFarlane | 2005-10-18 |
| 6936537 | Methods for forming low-k dielectric films | Patrick J. Helly, Ce Ma, Laura Miller | 2005-08-30 |
| 6818566 | Thermal activation of fluorine for use in a semiconductor chamber | Noel James Leeson, Graham Hodgson, Peter Harold Buckley | 2004-11-16 |
| 6361020 | Valve for use with high purity gas | David William Birch, Peter Harold Buckley, Kenneth W. Cross, Kazuya Inoue, Jack B. Wert | 2002-03-26 |
| 5485736 | Seamless cylinder shell construction | John Collier, James G. Marsh, Prakash John Thomas | 1996-01-23 |
| 4444811 | Fluidized bed silicon deposition from silane | George Hsu, Harry Levin, Ananda Praturi, Ralph Lutwack | 1984-04-24 |
| 4314525 | Fluidized bed silicon deposition from silane | George Hsu, Harry Levin, Ananda Praturi, Ralph Lutwack | 1982-02-09 |