Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514119 | Method and apparatus for using solution based precursors for atomic layer deposition | Ce Ma, Qing Min Wang, Richard Hogle | 2009-04-07 |
| 6936537 | Methods for forming low-k dielectric films | Richard Hogle, Ce Ma, Laura Miller | 2005-08-30 |
| 6444013 | Purification of methylsilanes | Masud Akhtar | 2002-09-03 |