| 9731958 |
Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier |
Fabien Filhol, Pierre-Olivier Lefort, Bertrand Leverrier, Bernard Chaumet |
2017-08-15 |
| 9423292 |
Sensor with a vibrating member in a cavity with integrated anomaly detection |
Yann Planchette, Jean-Michel Muguet |
2016-08-23 |
| 9176165 |
Vibrating micro-system with automatic gain control loop, with integrated control of the quality factor |
Sebastien Simoens, Pierre-Olivier Lefort |
2015-11-03 |
| 8297121 |
Micro-machined accelerometer |
Olivier Lefort, Andre Boura |
2012-10-30 |
| 8243414 |
Electrostatic device for damping a mechanical vibration movement of a resonant moving object |
Christophe Taurand |
2012-08-14 |
| 7124633 |
Vibrating beam accelerometer |
Jérôme Inglese, Claude Rougeot |
2006-10-24 |
| 6901029 |
Towed low-frequency underwater detection system |
Louis Raillon, Jean-Jacques Fyot, Christine Debaillon-Vesque |
2005-05-31 |