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Calibration method for a micromachined inertial angle sensor and calibration system |
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Method for calibrating a vibrating inertial sensor |
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Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier |
Fabien Filhol, Pierre-Olivier Lefort, Bertrand Leverrier, Régis Quer |
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MEMS angular inertial sensor operating in tuning fork mode |
Fabien Filhol, Claude Rougeot, Bertrand Leverrier |
2017-02-21 |
| 9463974 |
Micro-electro-mechanical systems (MEMS) |
Bertrand Leverrier, Olivier Lefort, Andre Boura |
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Vibrating structure gyrometer with at least one tuning fork |
— |
2014-12-16 |
| 8826737 |
Vibrating structure gyrometer with at least one tuning fork |
— |
2014-09-09 |
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Vibratory gyroscope balanced by an electrostatic device |
— |
2012-01-31 |
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Micro-machined gyrometric sensor for differential measurement of the movement of vibrating masses |
Claude Rougeot, Bertrand Le Verrier, Jérôme Willemin |
2010-05-04 |
| 7284429 |
Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer |
Bertrand Leverrier, Claude Rougeot |
2007-10-23 |
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Vibrating rate gyro with slaving of detection frequency to excitation frequency |
Pierre Gallon |
2007-01-09 |
| 7051591 |
Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer |
Eric Loil |
2006-05-30 |
| 7040162 |
Vibrating mass gyro |
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2006-05-09 |