Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9731958 | Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier | Pierre-Olivier Lefort, Bertrand Leverrier, Régis Quer, Bernard Chaumet | 2017-08-15 |
| 9574879 | MEMS angular inertial sensor operating in tuning fork mode | Bernard Chaumet, Claude Rougeot, Bertrand Leverrier | 2017-02-21 |
| 7408695 | Electrically rotationally actuatable micro-mirror or micro lens | Claire Divoux | 2008-08-05 |
| 7190502 | Oscillating micromirror with bimorph actuation | — | 2007-03-13 |