Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7682989 | Formation of a silicon oxide interface layer during silicon carbide etch stop deposition to promote better dielectric stack adhesion | Laura M. Matz, Ting Tsui, Robert J. Kraft | 2010-03-23 |