Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6561868 | System and method for controlling a polishing machine | Henry Litzmann Edwards, Thomas M. Moore | 2003-05-13 |
| 6326293 | Formation of recessed polysilicon plugs using chemical-mechanical-polishing (CMP) and selective oxidation | Mark Visokay, Rajesh Khamankar | 2001-12-04 |