Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7034982 | Method of improving the performance of microstructures | — | 2006-04-25 |
| 6960305 | Methods for forming and releasing microelectromechanical structures | Satyadev Patel, Andrew Huibers, Jason Reid | 2005-11-01 |
| 6952302 | Hinge structures for micro-mirror arrays | Satyadev Patel, Robert M. Duboc, Jr. | 2005-10-04 |
| 6913942 | Sacrificial layers for use in fabrications of microelectromechanical devices | Satyadev Patel | 2005-07-05 |
| 6849471 | Barrier layers for microelectromechanical systems | Satyadev Patel | 2005-02-01 |
| 6804039 | Multilayer hinge structures for micro-mirror arrays in projection displays | Satyadev Patel | 2004-10-12 |
| 6794279 | Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas | Alan D. Stephen, Michael E. Exterkamp | 2004-09-21 |