Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794279 | Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas | Michael E. Exterkamp, Jonathan Doan | 2004-09-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794279 | Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas | Michael E. Exterkamp, Jonathan Doan | 2004-09-21 |