Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910477 | Etch residue reduction by ash methodology | Deepak A. Ramappa | 2011-03-22 |
| 7811942 | Tri-layer plasma etch resist rework | Yong-Seok Choi | 2010-10-12 |
| 7569486 | Spin on glass (SOG) etch improvement method | Yong-Seok Choi | 2009-08-04 |
| 7341941 | Methods to facilitate etch uniformity and selectivity | Ting Tsui, Robert J. Kraft, Ping Jiang | 2008-03-11 |
| 7342315 | Method to increase mechanical fracture robustness of porous low k dielectric materials | Ting Tsui, Andrew John McKerrow | 2008-03-11 |