Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6682635 | Cathodic sputtering chamber for applying material to the surface of a semiconductor wafer located therein | Hermann Bichler, Reinhard Hanzlik, Frank Mueller, Stefan Fries | 2004-01-27 | $41,018,000 |
| 5019205 | Apparatus for wet etching of thin films | Helmut Rinck | 1991-05-28 | $2,901,000 |
| 4969973 | Method for etching an electrically conductive layer applied to a substrate | Helmut Rinck | 1990-11-13 | $6,678,000 |