Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682635 | Cathodic sputtering chamber for applying material to the surface of a semiconductor wafer located therein | Hermann Bichler, Reinhard Hanzlik, Frank Mueller, Stefan Fries | 2004-01-27 |
| 5019205 | Apparatus for wet etching of thin films | Helmut Rinck | 1991-05-28 |
| 4969973 | Method for etching an electrically conductive layer applied to a substrate | Helmut Rinck | 1990-11-13 |