Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6028006 | Method for maintaining the buffer capacity of siliceous chemical-mechanical silicon polishing slurries | Mohendra S. Bawa, Vikki S. Simpson, Palmer A. Miller, Gary Lee Etheridge, Kenneth John L'Anglois +1 more | 2000-02-22 |
| 5424224 | Method of surface protection of a semiconductor wafer during polishing | Eugene C. Davis, Lawrence D. Dyer, Jerry B. Medders, Vikki S. Simpson, Jerry D. Smith +2 more | 1995-06-13 |
| 5394655 | Semiconductor polishing pad | William L. Smith, Thomas G. Debner, Dennis L. Olmstead | 1995-03-07 |