Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5864773 | Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment | Gabriel G. Barna, Stephanie W. Butler, David Anthony White | 1999-01-26 | $36,691,000 |