Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096473 | Formation of a layer on a semiconductor substrate | Maxim Kelman, Zhongyuan Jia, Somnath Nag | 2018-10-09 |
| 9708707 | Nanolayer deposition using bias power treatment | Tue Nguyen, Tai Dung Nguyen | 2017-07-18 |
| 9121098 | NanoLayer Deposition process for composite films | Tue Nguyen, Tai Dung Nguyen | 2015-09-01 |
| 7955870 | Dry etch stop process for eliminating electrical shorting in MRAM device structures | — | 2011-06-07 |
| 7645618 | Dry etch stop process for eliminating electrical shorting in MRAM device structures | — | 2010-01-12 |
| 7169623 | System and method for processing a wafer including stop-on-aluminum processing | — | 2007-01-30 |
| 6521081 | Deposition shield for a plasma reactor | Stephen P. DeOrnellas | 2003-02-18 |
| 6360686 | Plasma reactor with a deposition shield | Stephen P. DeOrnellas | 2002-03-26 |
| 6173674 | Plasma reactor with a deposition shield | Stephen P. DeOrnellas | 2001-01-16 |
| 6170431 | Plasma reactor with a deposition shield | Stephen P. DeOrnellas | 2001-01-09 |
| 6006694 | Plasma reactor with a deposition shield | Stephen P. DeOrnellas | 1999-12-28 |