Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242362 | Etch process for fabricating a vertical hard mask/conductive pattern profile to improve T-shaped profile for a silicon oxynitride hard mask | Jen-Cheng Liu, Huan-Just Lin, Chia-Shiung Tsai | 2001-06-05 |