Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283514 | Method and system for processing wafer | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Po-Chih Huang, Xuan Zheng +2 more | 2025-04-22 |
| 11972957 | Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Po-Chih Huang, Xuan Zheng | 2024-04-30 |