Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394635 | Systems and methods for processing a substrate | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Chen-Hao LIAO, Min-Cheng CHUNG | 2025-08-19 |
| 12378995 | Linear guide, carriage, end cap and method for lubrication | Andreas Drügemöller, Yung-Chang Chiou, Fung Cheung | 2025-08-05 |
| 12283514 | Method and system for processing wafer | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Yu-Hsiang Juan, Xuan Zheng +2 more | 2025-04-22 |
| 12249493 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Sheng-chun Yang, Yi-Ming Lin, Po-Wei Liang, Chu-Han HSIEH, Chih-Lung CHENG | 2025-03-11 |
| 12055228 | Valve for throttling gas flow from a semiconductor processing tool | Sheng-chun Yang, Chang-Bum Chun, Xuan Zheng, Tzu-Chuan Chao, Ren-Jyue Wang +1 more | 2024-08-06 |
| 11972957 | Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Yu-Hsiang Juan, Xuan Zheng | 2024-04-30 |
| 11594401 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Sheng-chun Yang, Yi-Ming Lin, Po-Wei Liang, Chu-Han HSIEH, Chih-Lung CHENG | 2023-02-28 |