Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394635 | Systems and methods for processing a substrate | Sheng-chun Yang, Po-Chih Huang, Yi-Ming Lin, Chen-Hao LIAO, Min-Cheng CHUNG | 2025-08-19 |
| 12283514 | Method and system for processing wafer | Sheng-chun Yang, Yi-Ming Lin, Po-Chih Huang, Yu-Hsiang Juan, Xuan Zheng +2 more | 2025-04-22 |
| 12249493 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Sheng-chun Yang, Yi-Ming Lin, Po-Wei Liang, Chu-Han HSIEH, Po-Chih Huang | 2025-03-11 |
| 11972957 | Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool | Sheng-chun Yang, Yi-Ming Lin, Po-Chih Huang, Yu-Hsiang Juan, Xuan Zheng | 2024-04-30 |
| 11652124 | Isolation structure having an air gap to reduce pixel crosstalk | Tsung-Wei Huang, Chao-Ching Chang, Yun-Wei Cheng, Yen-Chang Chen, Wen-Jen Tsai +4 more | 2023-05-16 |
| 11594401 | Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure | Sheng-chun Yang, Yi-Ming Lin, Po-Wei Liang, Chu-Han HSIEH, Po-Chih Huang | 2023-02-28 |
| 10160090 | Chemical mechanical polishing method | Yu-Ming Kuo, Li-Ming Hsu | 2018-12-25 |