Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8215890 | Semiconductor wafer robot alignment system and method | Kuo-Shu Tseng, Chia-Chi Tsao, Chih-Che Lin | 2012-07-10 |
| 7301604 | Method to predict and identify defocus wafers | Chun-Hung Lin, Louie Liu, Li-Kong Turn, Chi-Hung Liao, Ham-Ming Hsieh +1 more | 2007-11-27 |
| 6975407 | Method of wafer height mapping | Chun-Sheng Wang, Chi-Hung Liao, Li-Kong Turn, Louie Liu | 2005-12-13 |