Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8952330 | System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope | Syun-Jie Jhan, Yi-Cheng Shih, Chwen Yu | 2015-02-10 |
| 8633439 | System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope | Syun-Jie Jhan, Yi-Cheng Shih, Chwen Yu | 2014-01-21 |
| 8215890 | Semiconductor wafer robot alignment system and method | Kuo-Shu Tseng, Yi-Chang Sung, Chih-Che Lin | 2012-07-10 |