Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513444 | Noise reduction for overlay control | Weimin Hu, Kai-Hsiung Chen, Chun-Ming Hu, Chih-Ming Ke | 2022-11-29 |
| 10866524 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2020-12-15 |
| 10867116 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2020-12-15 |
| 10684556 | Noise reduction for overlay control | Weimin Hu, Kai-Hsiung Chen, Chun-Ming Hu, Chih-Ming Ke | 2020-06-16 |
| 10521548 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2019-12-31 |
| 10514612 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2019-12-24 |
| 10281827 | Noise reduction for overlay control | Weimin Hu, Kai-Hsiung Chen, Chun-Ming Hu, Chih-Ming Ke | 2019-05-07 |
| 10031426 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2018-07-24 |
| 10031997 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2018-07-24 |
| 9070622 | Systems and methods for similarity-based semiconductor process control | Chih-Ming Ke, Ching-Pin Kao, Kai-Hsiung Chen, Chun-Ming Hu | 2015-06-30 |
| 9053284 | Method and system for overlay control | Kai-Hsiung Chen, Chih-Ming Ke | 2015-06-09 |