Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6210843 | Modulation of peripheral critical dimension on photomask with differential electron beam dose | Fred Chen, Yoshihiro Tezuka, Steven Labovitz, Jeff Farnsworth | 2001-04-03 |
| 5627105 | Plasma etch process and TiSi.sub.x layers made using the process | Michelangelo Delfino, Mary E. Day | 1997-05-06 |
| 5186973 | HFCVD method for producing thick, adherent and coherent polycrystalline diamonds films | Diwakar Garg, Fred M. Kimock, Robert L. Iampietro, Paul N. Dyer | 1993-02-16 |
| 5160544 | Hot filament chemical vapor deposition reactor | Diwakar Garg, Robert L. Iampietro, Fred M. Kimock, C. Michael Kelly | 1992-11-03 |
| 5126206 | Diamond-on-a-substrate for electronic applications | Diwakar Garg, Robert L. Iampietro, Fred M. Kimock, Paul N. Dyer | 1992-06-30 |
| 5049174 | Hybrid membrane - cryogenic generation of argon concurrently with nitrogen | Robert M. Thorogood, Robert F. Weimer, David Hon Sing Ying | 1991-09-17 |