Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6117348 | Real time monitoring of plasma etching process | YUNG-SUNG PENG, Yuan-Ko Hwang, Jeng Kuen Lu | 2000-09-12 |
| 6001538 | Damage free passivation layer etching process | Sen-Fu Chen, Jie Wu, Fang Chen | 1999-12-14 |