Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7176135 | EBR shape of spin-on low-k material providing good film stacking | Yu-Huei Chen, Chen-Hua Yu | 2007-02-13 |
| 6706637 | Dual damascene aperture formation method absent intermediate etch stop layer | Yu-Huei Chen, Yao-Yi Cheng, Chen-Hua Yu | 2004-03-16 |
| 6599838 | Method for forming metal filled semiconductor features to improve a subsequent metal CMP process | Tsu Shih | 2003-07-29 |
| 6589852 | Method of replicating alignment marks for semiconductor wafer photolithography | Tsu Shih | 2003-07-08 |