Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406869 | Systems and methods for humidity control of FOUP during semiconductor fabrication | Kuang-Wei Cheng, Cheng-Lung Wu, Yi-Fam Shiu, Chyi-Tsong Ni | 2025-09-02 |
| 12325913 | Deflector for chamber cleaning | Kuang-Wei Cheng, Yung-Tsun Liu, Chih-Tsung Lee, Chyi-Tsong Ni | 2025-06-10 |
| 12276024 | Device and methods for chemical vapor deposition | Yung-Tsun Liu, Kuang-Wei Cheng, Chih-Tsung Lee, Chyi-Tsong Ni | 2025-04-15 |
| 12172117 | Laminar gas flow filter | Jyh-Shiou Hsu, Wen-Hsun Tsai, Chien-Chun Hu, Kuang-Wei Cheng | 2024-12-24 |
| 12051609 | Systems and methods for humidity control of FOUP during semiconductor fabrication | Kuang-Wei Cheng, Cheng-Lung Wu, Yi-Fam Shiu, Chyi-Tsong Ni | 2024-07-30 |