Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7238586 | Seamless trench fill method utilizing sub-atmospheric pressure chemical vapor deposition technique | Shao-Ta Hsu, Teng-Chun Tsai | 2007-07-03 |
| 6989337 | Silicon oxide gap-filling process | Hsiu-Chuan Chu, Chih-An Huang, Teng-Chun Tsai | 2006-01-24 |
| 6913978 | Method for forming shallow trench isolation structure | Hsiu-Chuan Chu, Chih-An Huang, Hsiao-Ling Lu, Teng-Chun Tsai | 2005-07-05 |
| 6891244 | Plug structure having low contact resistance and method of manufacturing | — | 2005-05-10 |