Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698030 | Temperature controlled loadlock chamber | Chun-Hsien Lin, Jyh-Cherng Sheu, Kewei Zuo | 2017-07-04 |
| 8905124 | Temperature controlled loadlock chamber | Chun-Hsien Lin, Jyh-Cherng Sheu, Kewei Zuo | 2014-12-09 |