Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271116 | Method of measuring mask overlay using test patterns | Tseng Chin Lo, Bo-Sen Chang, Yueh-Yi Chen, Chih-Ting Sun, Ying-Jung Chen +1 more | 2025-04-08 |
| 11762302 | Integrated circuit overlay test patterns and method thereof | Tseng Chin Lo, Bo-Sen Chang, Yueh-Yi Chen, Chih-Ting Sun, Ying-Jung Chen +1 more | 2023-09-19 |
| 11016398 | Integrated circuit overlay test patterns and method thereof | Tseng Chin Lo, Bo-Sen Chang, Yueh-Yi Chen, Chih-Ting Sun, Ying-Jung Chen +1 more | 2021-05-25 |