Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189287 | Photoresist composition and method of forming photoresist pattern | Wei-Han Lai, Ching-Yu Chang | 2025-01-07 |
| 11714355 | Photoresist composition and method of forming photoresist pattern | Wei-Han Lai, Ching-Yu Chang | 2023-08-01 |
| 11550220 | Negative tone photoresist for EUV lithography | Wei-Han Lai, Ching-Yu Chang | 2023-01-10 |
| 10879078 | Method of patterning resist layer and method of forming semiconductor structure using patterned resist layer | Chien-Wei Wang, Ching-Yu Chang | 2020-12-29 |
| 10312108 | Method for forming semiconductor structure using modified resist layer | Chien-Wei Wang, Wei-Han Lai, Chin-Hsiang Lin | 2019-06-04 |