Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7172948 | Method to avoid a laser marked area step height | Chin-Kun Fang, Wei-Jen Wu, Ching-Jiunn Huang, Chung-Jen Chen | 2007-02-06 |
| 7031794 | Smart overlay control | Hsin-Yuan Chen, Yo-Nien Lin, Feng-Cheng Chung | 2006-04-18 |
| 6978191 | Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement | Yo-Nien Lin, Kuan-Luan Cheng, Hsin-Yuan Chen | 2005-12-20 |
| 6735485 | Overlay registration correction method for multiple product type microelectronic fabrication foundry facility | Wen-Hung Wu | 2004-05-11 |
| 6507394 | Method and apparatus for inspecting the surface of a semiconductor device | I-Chung Chang | 2003-01-14 |
| 6396567 | Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithography | Tsu-Yu Chu, I-Chung Chang | 2002-05-28 |
| 6357131 | Overlay reliability monitor | I-Chung Chang | 2002-03-19 |
| 5902707 | Mask containing alignment mark protection pattern | Tsu-Yu Chu, Jui-Yu Chang | 1999-05-11 |
| 5843600 | Use of sub divided pattern for alignment mark recovery after inter-level dielectric planarization | Tsu-Yu Chu, Jui-Yu Chang | 1998-12-01 |