Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723654 | Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer | Kuei-Jen Chang, Yuan-Ko Hwang, Jen-Yung Tseng | 2004-04-20 |
| 6489227 | Method of etching a polysilicon layer during the stripping of the photoresist shape used as an etch mask to create an opening to an underlying fuse structure | Tsung-Chi Hsieh, Yuan-Ko Hwang, Kuei-Jen Chang | 2002-12-03 |