JT

Jen-Yung Tseng

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,476,629 of 4,157,543Top 85%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6723654 Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer Kuei-Jen Chang, Yuan-Ko Hwang, Juei-Wen Lin 2004-04-20