Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6706640 | Metal silicide etch resistant plasma etch method | Ming-Huan Tsai, Peng-Fu Hsu, Hun-Jan Tao | 2004-03-16 |
| 6498067 | Integrated approach for controlling top dielectric loss during spacer etching | Baw-Ching Perng, Ming-Huang Tsai, Hun-Jan Tao | 2002-12-24 |